Semiconductor storage device and inspection method

A semiconductor storage device of an embodiment includes a stacked body including a plurality of conductive layers stacked via insulating layers, and a step portion in which end portions of the plurality of conductive layers have a stepwise shape, a plurality of pillars extending in the stacked body...

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1. Verfasser: TSUGAWA, AKIHIKO
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:A semiconductor storage device of an embodiment includes a stacked body including a plurality of conductive layers stacked via insulating layers, and a step portion in which end portions of the plurality of conductive layers have a stepwise shape, a plurality of pillars extending in the stacked body in a stacking direction of the stacked body, and forming a plurality of memory cells at intersection portions with at least part the plurality of conductive layers, and a plurality of contacts disposed for respective steps of the step portion, and to be electrically connected with the conductive layers of the respective steps. Among the plurality of contacts, a first plug is disposed on a contact connected to an (n-1)-th (n is an integer of two or more) conductive layer from an undermost layer, and a second plug is disposed on the first plug, and among the plurality of contacts, the first plug is not disposed but the second plug is disposed on a contact connected to an n-th conductive layer from the undermost laye