Electrostatic chuck and method for manufacturing the same

An electrostatic chuck includes a conductive main body, various insulation bushes, and an insulation layer. The conductive main body has at least one channel and various first holes disposed within the conductive main body. Each of the first holes has a first opening located in a surface of the conductive main body, and a second opening connected to the at least one channel. The insulation bushes are correspondingly disposed within the first holes, in which each of the insulation bushes has a second hole, and each of the insulation bushes extends from the first opening of the corresponding first hole toward the second opening of the corresponding first hole. The insulation layer covers the surface of the conductive main body and the insulation bushes.