Process method for heterogeneous epitaxial semiconductor material on mica sheet

The invention is disclosed a process method for heterogeneous epitaxial semiconductor material on mica sheet, comprising steps of providing a mica substrate; and depositing at least one semiconductor film on the mica substrate to form a flexural substrate. The flexural substrate is resistant to bend...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LO, WAN-JUNG, CHU, YING-HAO, CHOU, YIIA
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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