Substrate-conveying device, and substrate-processing device comprising substrate-conveying device

According to one embodiment for supplying an automated device that conveys a rectangular substrate, a substrate-conveying device is provided for conveying the rectangular substrate, the substrate-conveying device having: a plurality of conveying rollers configured so as to support the bottom surface...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	TOGAWA, TETSUJI, YAZAWA, AKIHIRO, MITSUYA, TAKASHI, DU, FONG-JIE, NANJO, TAKAHIRO, KOBAYASHI, KENICHI, KASHIWAGI, MAKOTO, MATSUGU, ASAGI, KOBA, TAKASHI, AKAZAWA, KENICHI, AOYAMA, HIDEHARU
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	According to one embodiment for supplying an automated device that conveys a rectangular substrate, a substrate-conveying device is provided for conveying the rectangular substrate, the substrate-conveying device having: a plurality of conveying rollers configured so as to support the bottom surface of the substrate; a plurality of roller shafts to which the plurality of conveying rollers are attached; a motor for rotating the plurality of roller shafts; and a pusher for raising the substrate that is on the plurality of conveying rollers so that the substrate is separated from the plurality of conveying rollers, the pusher having a stage that can pass through a gap among the plurality of roller shafts.