High-q integrated inductor and method thereof

A device comprises: a substrate; a dielectric slab attached upon the substrate; a coil including a plurality of metal segments laid out on a first metal layer secured by the dielectric slab, the coil being substantially symmetrical with respect to a central line as seen from a top view; and a shield...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WU, IANG, SONG, FEI, LIN, CHIA-LIANG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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