High-q integrated inductor and method thereof

A device comprises: a substrate; a dielectric slab attached upon the substrate; a coil including a plurality of metal segments laid out on a first metal layer secured by the dielectric slab, the coil being substantially symmetrical with respect to a central line as seen from a top view; and a shield laid out on a second metal layer secured by the dielectric slab and configured in a tree topology, the shield being substantially symmetrical with respect to the central line as seen from the top view, the tree topology including a plurality of clusters of branches, wherein each of said plurality of clusters of branches is associated with a respective metal segment of the coil and includes a primary branch and at least one set of secondary branches that are branched from the primary branch, parallel to one another, and oriented at a forty-five-degree angle with respect to the respective metal segment as seen from the top view.