Radiation shielding device and apparatus comprising such shielding device

An apparatus comprising a heat-sensitive device; a radiative element, the radiative element in operation generating first electromagnetic radiation, the first radiation propagating towards the heat-sensitive device; and a radiation-shielding device arranged between the radiative element and the heat...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	WATERSON, NICHOLAS PETER, SCHMITZ, ROGER WILHELMUS ANTONIUS HENRICUS, VAN DE MEERENDONK, REMCO, NAKIBOGLU, GUNES, JANSSEN, FRANCISCUS JOHANNES JOSEPH, VAN DEN BOOM, JORIS DOMINICUS BASTIAAN JOHANNES, HABETS, PHILIPPE JACQUELINE JOHANNES HUBERTUS ANTHONIUS
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	An apparatus comprising a heat-sensitive device; a radiative element, the radiative element in operation generating first electromagnetic radiation, the first radiation propagating towards the heat-sensitive device; and a radiation-shielding device arranged between the radiative element and the heat-sensitive device such that, in operation, the first radiation impinges on the radiation-shielding device. The radiation-shielding device comprises a first shield element having a first fluid channel arranged therein, the first shield element having a first surface and a second surface, the first surface being arranged closer to the radiative element than the second surface; and a second shield element having a second fluid channel arranged therein, the second shield element having a third surface and a fourth surface, the third surface being arranged closer to the radiative element than the fourth surface. The first shield element is arranged closer to the radiative element than the second shield element and the s