Fe-Pt-OXIDE-BN SINTERED BODY FOR SPUTTERING TARGETS

Fe-Pt-OXIDE-BN SINTERED BODY FOR SPUTTERING TARGETS

Provided is an Fe-Pt-oxide-BN sintered body for high-density sputtering targets, which is capable of suppressing the generation of particles during sputtering. An Fe-Pt-oxide-BN sintered body for sputtering targets, which is configured such that the mass ratio of N to B, namely N/B is within the ran...

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Hauptverfasser: NISHIURA, MASAHIRO, KUROSE, KENTA, MIYASHITA, TAKANOBU, KOBAYASHI, HIRONORI, YAMAMOTO, TAKAMICHI
Format: Patent
Sprache:chi ; eng
Schlagworte:
ALLOYS
CHEMISTRY
FERROUS OR NON-FERROUS ALLOYS
METALLURGY
TREATMENT OF ALLOYS OR NON-FERROUS METALS
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creator NISHIURA, MASAHIRO
KUROSE, KENTA
MIYASHITA, TAKANOBU
KOBAYASHI, HIRONORI
YAMAMOTO, TAKAMICHI
description Provided is an Fe-Pt-oxide-BN sintered body for high-density sputtering targets, which is capable of suppressing the generation of particles during sputtering. An Fe-Pt-oxide-BN sintered body for sputtering targets, which is configured such that the mass ratio of N to B, namely N/B is within the range of 1.30 ± 0.1.
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subjects ALLOYS
CHEMISTRY
FERROUS OR NON-FERROUS ALLOYS
METALLURGY
TREATMENT OF ALLOYS OR NON-FERROUS METALS
title Fe-Pt-OXIDE-BN SINTERED BODY FOR SPUTTERING TARGETS
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