Fe-Pt-OXIDE-BN SINTERED BODY FOR SPUTTERING TARGETS

Provided is an Fe-Pt-oxide-BN sintered body for high-density sputtering targets, which is capable of suppressing the generation of particles during sputtering. An Fe-Pt-oxide-BN sintered body for sputtering targets, which is configured such that the mass ratio of N to B, namely N/B is within the ran...

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Bibliographische Detailangaben
Hauptverfasser:	NISHIURA, MASAHIRO, KUROSE, KENTA, MIYASHITA, TAKANOBU, KOBAYASHI, HIRONORI, YAMAMOTO, TAKAMICHI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ALLOYS CHEMISTRY FERROUS OR NON-FERROUS ALLOYS METALLURGY TREATMENT OF ALLOYS OR NON-FERROUS METALS
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Beschreibung
Zusammenfassung:	Provided is an Fe-Pt-oxide-BN sintered body for high-density sputtering targets, which is capable of suppressing the generation of particles during sputtering. An Fe-Pt-oxide-BN sintered body for sputtering targets, which is configured such that the mass ratio of N to B, namely N/B is within the range of 1.30 ± 0.1.