Self-diagnosis module and self-diagnosis method of plasma power supply

A self-diagnosis module and a self-diagnosis method of a plasma power supply are disclosed. According to an embodiment of the present invention, the self-diagnosis module of a plasma power supply comprises: a dummy load resistance connected to a power supply terminal unit to perform a self-diagnosis of the plasma power supply; a test current applying unit for inputting a power supply driving current to the dummy load resistance; a data collecting unit collecting self-diagnosis data including input/output currents, a voltage, a temperature, an operation state measured by a test current applied to the power supply from a diagnosis sensor provided in input/output nodes of a circuit and a component configuring the power supply; and a determining unit for comparing the self-diagnosis data received from the data collecting unit with a preset value to determine whether each of the circuit and the component of the power supply is defective.