Laser beam monitoring system

A laser beam monitoring system configured to monitor an attribute of an incident laser beam, the laser beam monitoring system comprising a beam separating element and a plurality of sensors, wherein the beam separating element is configured to form a plurality of sub-beams from the incident laser be...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	VAN GREEVENBROEK, HENDRIKUS ROBERTUS MARIE
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MATERIALS THEREFOR MEASURING ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS TESTING TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
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