Transfer device and transfer method including a loading station and a transfer machine

The present invention is a transfer device 10 for transferring a cartridge 90 to a vapor deposition device 80, and the transfer device 10 includes a loading station 30 and a transfer machine 20. The loading station 30, the transfer machine 20, and a loading port 83 of the vapor deposition device are...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: DEGUCHI, YOSHITAKA, SUEHIRO, NAOYA
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:The present invention is a transfer device 10 for transferring a cartridge 90 to a vapor deposition device 80, and the transfer device 10 includes a loading station 30 and a transfer machine 20. The loading station 30, the transfer machine 20, and a loading port 83 of the vapor deposition device are arranged at a position overlapping one another in a top view. The transfer machine 20 is configured to move the cartridge 90 upwards and downwards between the loading station 30 and the loading port 83 of the vapor deposition device 80. The loading station 30 is configured in such a manner that the loading station 30 is on a uplifting-downloading pathway of the cartridge 90 when the transfer machine 20 transfers the cartridge 90 in and out with respect to the loading station 30, and the loading station 30 is capable of moving in a direction away from the uplifting-downloading pathway of the cartridge 90 when the transfer machine 20 is used to move the cartridge 90 upwards and downwards.