Test system, test interface board, semiconductor device and manufacturing method thereof

Test system, test interface board, semiconductor device and manufacturing method thereof

A test system includes automatic test equipment configured to test a device under test, and a test interface board configured to measure a second voltage applied to the device under test based on a first voltage supplied from the automatic test equipment. The test interface board includes a sensing...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MIN, YOUNG-GI, YOO, JONG-WOON, HWANG, DAE-HA, KIM, JONG-KOOK, PARK, SOO-YONG
Format: Patent
Sprache:chi ; eng
Schlagworte:
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:A test system includes automatic test equipment configured to test a device under test, and a test interface board configured to measure a second voltage applied to the device under test based on a first voltage supplied from the automatic test equipment. The test interface board includes a sensing wiring configured to transmit the measured second voltage to the automatic test equipment. The second voltage is measured at an interior location of the device under test.