Through-electrode substrate and semiconductor device using through-electrode substrate
This through-electrode substrate comprises: a substrate constituted by an inorganic material; first wiring disposed on the substrate; a through-hole disposed on the substrate at a position apart from the first wiring; a through-electrode disposed on the inner wall of the through-hole; and second wir...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | This through-electrode substrate comprises: a substrate constituted by an inorganic material; first wiring disposed on the substrate; a through-hole disposed on the substrate at a position apart from the first wiring; a through-electrode disposed on the inner wall of the through-hole; and second wiring connecting the first wiring and the through-electrode. According to the present disclosure, electrical continuity between the through-electrode and the wiring on the substrate is ensured in a high aspect ratio through-electrode substrate using a glass substrate, and a through-electrode substrate with improved electrical reliability and a method for producing the same can be provided. |
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