Method and device for transporting substrates

The invention relates to a method and to a device for transporting substrates, in particular for producing solar cells, wherein in a first transport step a first carrier having a first number of substrates is transported into a packing position, in a first work step at least one first substrate pack...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	VENHUES, LARS, ANDERS, OLAF
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	The invention relates to a method and to a device for transporting substrates, in particular for producing solar cells, wherein in a first transport step a first carrier having a first number of substrates is transported into a packing position, in a first work step at least one first substrate pack is provided in the first carrier, in a second transport step the first carrier is moved into a transfer position, in a second work step the at least first substrate pack is transported from the first carrier into a first process boat and at least one further substrate pack is transported from a process boat into the first carrier, in a third transport step the first carrier is transported into an unpacking position, and in a third work step the at least one further substrate pack is unpacked.