Coaxial probe card device

A coaxial probe card device includes a substrate, multiple probe bases, multiple probes and a limiting assembly. The base has a through hole. The probes are respectively obliquely with respect to the surface of the substrate. The probes are respectively disposed on the each probe base. Every probe extends to the through hole. Every probe includes a coaxial cable and a probing element. The coaxial cable has a first section and a second section. The first section is fixed at the probe base. The probing element is fixed at the second section. There is an inclined angle between the first section and the second section. The inclined angles of the least two probe of the multiple probes are different. The limiting assembly is fixed to the coaxial cables of the probes. Therefore, every coaxial cable of the probe is stably located by limiting assembly.