Air filling device for FOUP and air filling system

An air filling system comprises an air filling device and a FOUP connected to the air filling device. The air filling device comprises an air filling assembly and an air extracting assembly. The air filling assembly fills air with desired humidity and desired pressure to the FOUP when the air fillin...

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Bibliographische Detailangaben
Hauptverfasser:	LU, CHIHNG, CHEN, CHUNUNG, HUANG, CHUN-KAI, CHIU, YIUN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS CONVEYING HANDLING THIN OR FILAMENTARY MATERIAL PACKAGES PACKAGING ELEMENTS PACKING PERFORMING OPERATIONS STORING TRANSPORTING
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Beschreibung
Zusammenfassung:	An air filling system comprises an air filling device and a FOUP connected to the air filling device. The air filling device comprises an air filling assembly and an air extracting assembly. The air filling assembly fills air with desired humidity and desired pressure to the FOUP when the air filling assembly receives a trigger command. When the air filling assembly begins to fills air to the FOUP, the air extracting assembly extracts air from the FOUP, and detects the humidity and the temperature of the extracted air. The humidity and the temperature of the extracted air correspond to a relative humidity of the extracted air. When the relative humidity of the extracted air is equal to a preset relative humidity, the air filling device stops filling air to the FOUP, and the air extracting assembly stops extracting air from the FOUP.