Cathode structure and ionized metal plasma device including the same

The disclosure invention relates to a cathode structure applied in a plasma apparatus. The cathode structure comprises a curved-surface solid part, a fixing part and a containing part. The containing part is disposed between the curved-surface solid part and the fixing part. The curved-surface solid...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CHUANG, MING-TE, CHIANG, HAO-NING, CHUANG, KAI-FU, HONG, SIANG-BAO, KAO, MING-HSIANG, KUO, YENIEH
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS
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