Cathode structure and ionized metal plasma device including the same
The disclosure invention relates to a cathode structure applied in a plasma apparatus. The cathode structure comprises a curved-surface solid part, a fixing part and a containing part. The containing part is disposed between the curved-surface solid part and the fixing part. The curved-surface solid...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The disclosure invention relates to a cathode structure applied in a plasma apparatus. The cathode structure comprises a curved-surface solid part, a fixing part and a containing part. The containing part is disposed between the curved-surface solid part and the fixing part. The curved-surface solid part includes a top curved surface and a bottom surface. A periphery of the top curved surface completely connects a periphery of the bottom surface. The fixing part is configured to fix the cathode structure on the plasma apparatus. The containing part is configured to receive a cathode filament of the plasma apparatus. The containing part connects the bottom surface of the-surface solid part and the fixing part. |
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