Monitoring device, monitoring method and computer-readable recording medium especially identifying the state of the vapor deposition process with high precision

The invention provides a monitoring device, a monitoring method and a computer readable recording medium. The monitoring device (1) includes an imaging unit (11) that takes the furnace lining (24) as the subject for imaging and performs multiple shots; an image selection unit (16) that selects an im...

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Bibliographische Detailangaben
Hauptverfasser:	YAMADA, MINORU, SENJU, NAOKI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CALCULATING CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPUTING COUNTING DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC DIGITAL DATA PROCESSING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PHYSICS SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	The invention provides a monitoring device, a monitoring method and a computer readable recording medium. The monitoring device (1) includes an imaging unit (11) that takes the furnace lining (24) as the subject for imaging and performs multiple shots; an image selection unit (16) that selects an image most relevant to the reference image as an analysis target image among the plurality of images captured by the imaging unit; and a state determination unit (17) determines the state of the vapor deposition device (2) by analyzing the target image selected by the image selection unit. With this configuration, the state of the vapor deposition device can be determined with high precision.