Rotational clamping device

A rotational clamping device is provided according to one embodiment of the invention. The rotational clamping device includes: a base; a clamp holder capable of translating and rotating relative to the base; a clamp disposed in the clamp holder for clamping the substrate; and a connection link conn...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CHO, HYUN-WOO, JUNG, JEE-HWAN, KANG, MYEONG-SEOK, YUYAMA, AKIRA, SATOU, MASARU
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:A rotational clamping device is provided according to one embodiment of the invention. The rotational clamping device includes: a base; a clamp holder capable of translating and rotating relative to the base; a clamp disposed in the clamp holder for clamping the substrate; and a connection link connecting the base and the clamp holder.