Rotational clamping device
A rotational clamping device is provided according to one embodiment of the invention. The rotational clamping device includes: a base; a clamp holder capable of translating and rotating relative to the base; a clamp disposed in the clamp holder for clamping the substrate; and a connection link conn...
Gespeichert in:
Hauptverfasser: | , , , , |
---|---|
Format: | Patent |
Sprache: | chi ; eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | A rotational clamping device is provided according to one embodiment of the invention. The rotational clamping device includes: a base; a clamp holder capable of translating and rotating relative to the base; a clamp disposed in the clamp holder for clamping the substrate; and a connection link connecting the base and the clamp holder. |
---|