Substrate transfer device substrate transfer method and recording medium

Provided is a technique capable of transferring a substrate to a preset position of a module with high accuracy. A device includes a substrate holding unit (25) configured to hold a substrate and be movable in a transversal direction to transfer the substrate from one module to another module; a first detecting unit (3) configured to detect a position of the substrate on the substrate holding unit (25) before the substrate holding unit (25) transfers the substrate into the another module after receiving the substrate from the one module; second detecting units (55, 56) configured to detect a position deviation between a position of the substrate holding unit (25), which is located at a temporary position set to transfer the substrate into the another module, and the temporary position; and a position determining unit (10) configured to determine a transfer position where the substrate is transferred into the another module based on the position of the substrate on the substrate holding unit (25) and the posit