Method for manufacturing inspection device capable of coping with micro pitches without damaging an object to be inspected
The present invention provides a method for manufacturing an inspection device capable of coping with micro pitches without damaging an object to be inspected during inspection of electrical characteristics. The method includes: using a mask 13 to expose and develop a photosensitive resin film 12, s...
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | The present invention provides a method for manufacturing an inspection device capable of coping with micro pitches without damaging an object to be inspected during inspection of electrical characteristics. The method includes: using a mask 13 to expose and develop a photosensitive resin film 12, so as to form a through hole penetrating in a thickness direction of a flexible sheet 15; and using a micro-dispenser 16 to fill a conductive material 17 containing conductive particles into the through hole of the flexible sheet 15. |
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