Vacuum system and method for depositing a plurality of materials on a substrate

A vacuum system (100) for depositing a plurality of materials on a substrate is described. The vacuum system includes a plurality of deposition modules (110) arranged along a main transport direction (P) and including deposition sources (105) which are movable in the main transport direction (P); and a transport system with a plurality of tracks (120) extending in the main transport direction (P) through the plurality of deposition modules and including a first mask track (121) for mask transport, a first substrate track (122) for substrate transport and a return track (123) for returning empty carriers.