Dye-containing alumite treated plasma indicator

An object of the present invention is to avoid contamination derived from an ink composition in a chamber. A dye-containing alumite-treated plasma indicator containing a dye in pores formed by anodic oxidation treatment is provided as the solution.

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Bibliographische Detailangaben
Hauptverfasser: ITO, ATSUSHI, URATANI, SHOTA, SAKUMURA, TAKESHI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:An object of the present invention is to avoid contamination derived from an ink composition in a chamber. A dye-containing alumite-treated plasma indicator containing a dye in pores formed by anodic oxidation treatment is provided as the solution.