Transport system and method

A transport system includes a load port, a plurality of first rails, a horizontal movable device, a lift, at least one second rail, and a first buffer stage. The load port is disposed adjacent to a machine relating to semiconductor processes. A space between at least portions of the first rails is o...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LI, FU-HSIEN, LIU, CHIH-HUNG, HUANG, POIN, WANG, JEN-TI, CHUANG, KUO-FONG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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