Transport system and method

A transport system includes a load port, a plurality of first rails, a horizontal movable device, a lift, at least one second rail, and a first buffer stage. The load port is disposed adjacent to a machine relating to semiconductor processes. A space between at least portions of the first rails is o...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	LI, FU-HSIEN, LIU, CHIH-HUNG, HUANG, POIN, WANG, JEN-TI, CHUANG, KUO-FONG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	A transport system includes a load port, a plurality of first rails, a horizontal movable device, a lift, at least one second rail, and a first buffer stage. The load port is disposed adjacent to a machine relating to semiconductor processes. A space between at least portions of the first rails is over the load port. The horizontal movable device is movably coupled to the first rails. The lift is disposed on the horizontal movable device. The second rail has successive first and second regions. The first region is under the space between the portions of the first rails, and the second region is not under the same space. The first buffer stage is movably couple to the second rail.