Wet chemical processing apparatus and method for using the same

Wet chemical processing apparatus and method for using the same

A wet chemical processing apparatus and a using method thereof are provided. The wet chemical processing apparatus contains an up-flow mode, a down-flow mode, and a static mode by providing two sets of pipes into the wet chemical processing apparatus and switching the valves of the pipes, thereby pu...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: YEH, YINNG, HUANG, LI-TSO, LAI, PIIEN, HSU, MING
Format: Patent
Sprache:chi ; eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A wet chemical processing apparatus and a using method thereof are provided. The wet chemical processing apparatus contains an up-flow mode, a down-flow mode, and a static mode by providing two sets of pipes into the wet chemical processing apparatus and switching the valves of the pipes, thereby purchase costs can be reduced.