Method for recycling tetramethylammonium hydroxide (TMAH) from the secondary waste developer

Disclosed is a method for recycling tetramethyl-ammonium hydroxide (TMAH) from the secondary waste developer, comprising a collecting step, a first adjusting step, a filtrating step, a purificating step, and a electrodialysis step., and concentration adjusting step. According to the method, photores...

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Bibliographische Detailangaben
Hauptverfasser:	HUANG, CHIH-MING, CHOU, SHENG-YUAN, CHANG, CHING-TANG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ACYCLIC OR CARBOCYCLIC COMPOUNDS APPARATUS SPECIALLY ADAPTED THEREFOR CHEMISTRY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR METALLURGY ORGANIC CHEMISTRY ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
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Beschreibung
Zusammenfassung:	Disclosed is a method for recycling tetramethyl-ammonium hydroxide (TMAH) from the secondary waste developer, comprising a collecting step, a first adjusting step, a filtrating step, a purificating step, and a electrodialysis step., and concentration adjusting step. According to the method, photoresist inside the secondary waste developer is removed, and then metal ions inside the secondary waste developer removerd by resin tower. During electrodialysis, tetramethylammonium ions are separated and transformed into TMAH.