Biosensor test piece manufactured without etching solvent and fabrication method thereof avoiding pollution caused by etching, having high fabrication efficiency, and capable of recycling removed metal film
A biosensor test piece manufactured without an etching solvent and a fabrication method thereof. The fabrication method comprises the following steps: firstly, forming a patterned to-be-peeled layer on a substrate, wherein the patterned to-be-peeled layer comprises a masking region and a hollow regi...
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| creator | SU, CHIEN-HAO HSU, KUON |
| description | A biosensor test piece manufactured without an etching solvent and a fabrication method thereof. The fabrication method comprises the following steps: firstly, forming a patterned to-be-peeled layer on a substrate, wherein the patterned to-be-peeled layer comprises a masking region and a hollow region; secondly, sputtering a metal film on the marking region of the patterned to-be-peeled layer and the substrate; thirdly, removing the patterned to-be-peeled layer by using a non-etching liquid to remove the metal film located on the marking region, so that the metal thin film forms a detection circuit corresponding to a circuit pattern; fourthly, forming a raising layer and a reaction enzyme on the detection circuit and the substrate; and then performing cleaning by using the non-etching liquid to form the detection circuit, so that the pollution caused by etching can be avoided, the fabrication efficiency is high, and the removed metal thin film can be recycled. |
| format | Patent |
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The fabrication method comprises the following steps: firstly, forming a patterned to-be-peeled layer on a substrate, wherein the patterned to-be-peeled layer comprises a masking region and a hollow region; secondly, sputtering a metal film on the marking region of the patterned to-be-peeled layer and the substrate; thirdly, removing the patterned to-be-peeled layer by using a non-etching liquid to remove the metal film located on the marking region, so that the metal thin film forms a detection circuit corresponding to a circuit pattern; fourthly, forming a raising layer and a reaction enzyme on the detection circuit and the substrate; and then performing cleaning by using the non-etching liquid to form the detection circuit, so that the pollution caused by etching can be avoided, the fabrication efficiency is high, and the removed metal thin film can be recycled.</description><subject>CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS</subject><subject>CHEMICAL SURFACE TREATMENT</subject><subject>CHEMISTRY</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING MATERIAL WITH METALLIC MATERIAL</subject><subject>COATING METALLIC MATERIAL</subject><subject>DIFFUSION TREATMENT OF METALLIC MATERIAL</subject><subject>ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</subject><subject>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</subject><subject>LINING MACHINES</subject><subject>MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS</subject><subject>MEASURING</subject><subject>METALLURGY</subject><subject>PERFORMING OPERATIONS</subject><subject>PHYSICS</subject><subject>PRINTED CIRCUITS</subject><subject>PRINTING</subject><subject>PRINTING MACHINES OR PRESSES</subject><subject>STAMPS</subject><subject>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><subject>TESTING</subject><subject>TRANSPORTING</subject><subject>TYPEWRITERS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2018</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNzbFOAzEMxvFbGFDhHcxepCtdWAui4gEqMVY-n9NYysVR4hy6l-SZyFUwsDF5-fv33XZfL6KFY9EMxsUgCRPDhLE6JKuZR_gU81oN2MhLvEDRMHM0wDiCwyELoYlGmLh1I5jnzOoAZ5Vx7ZOGUK8FYS0NHJZfawse57XxcvF_MHZOSDjSsr0OESYcAkODM9NCYf3KPOncwLaMAZyE6a67cRgK3__cTfdwfDu9vj9y0jOXhMSR7Xz6eOp3z_u-3_WH_X-ab5TvZ1Y</recordid><startdate>20180816</startdate><enddate>20180816</enddate><creator>SU, CHIEN-HAO</creator><creator>HSU, KUON</creator><scope>EVB</scope></search><sort><creationdate>20180816</creationdate><title>Biosensor test piece manufactured without etching solvent and fabrication method thereof avoiding pollution caused by etching, having high fabrication efficiency, and capable of recycling removed metal film</title><author>SU, CHIEN-HAO ; HSU, KUON</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_TW201830010A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2018</creationdate><topic>CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS</topic><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</topic><topic>LINING MACHINES</topic><topic>MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS</topic><topic>MEASURING</topic><topic>METALLURGY</topic><topic>PERFORMING OPERATIONS</topic><topic>PHYSICS</topic><topic>PRINTED CIRCUITS</topic><topic>PRINTING</topic><topic>PRINTING MACHINES OR PRESSES</topic><topic>STAMPS</topic><topic>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</topic><topic>TESTING</topic><topic>TRANSPORTING</topic><topic>TYPEWRITERS</topic><toplevel>online_resources</toplevel><creatorcontrib>SU, CHIEN-HAO</creatorcontrib><creatorcontrib>HSU, KUON</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>SU, CHIEN-HAO</au><au>HSU, KUON</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Biosensor test piece manufactured without etching solvent and fabrication method thereof avoiding pollution caused by etching, having high fabrication efficiency, and capable of recycling removed metal film</title><date>2018-08-16</date><risdate>2018</risdate><abstract>A biosensor test piece manufactured without an etching solvent and a fabrication method thereof. The fabrication method comprises the following steps: firstly, forming a patterned to-be-peeled layer on a substrate, wherein the patterned to-be-peeled layer comprises a masking region and a hollow region; secondly, sputtering a metal film on the marking region of the patterned to-be-peeled layer and the substrate; thirdly, removing the patterned to-be-peeled layer by using a non-etching liquid to remove the metal film located on the marking region, so that the metal thin film forms a detection circuit corresponding to a circuit pattern; fourthly, forming a raising layer and a reaction enzyme on the detection circuit and the substrate; and then performing cleaning by using the non-etching liquid to form the detection circuit, so that the pollution caused by etching can be avoided, the fabrication efficiency is high, and the removed metal thin film can be recycled.</abstract><oa>free_for_read</oa></addata></record> |
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| language | chi ; eng |
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| subjects | CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES LINING MACHINES MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS MEASURING METALLURGY PERFORMING OPERATIONS PHYSICS PRINTED CIRCUITS PRINTING PRINTING MACHINES OR PRESSES STAMPS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TESTING TRANSPORTING TYPEWRITERS |
| title | Biosensor test piece manufactured without etching solvent and fabrication method thereof avoiding pollution caused by etching, having high fabrication efficiency, and capable of recycling removed metal film |
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