Biosensor test piece manufactured without etching solvent and fabrication method thereof avoiding pollution caused by etching, having high fabrication efficiency, and capable of recycling removed metal film

A biosensor test piece manufactured without an etching solvent and a fabrication method thereof. The fabrication method comprises the following steps: firstly, forming a patterned to-be-peeled layer on a substrate, wherein the patterned to-be-peeled layer comprises a masking region and a hollow regi...

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Bibliographische Detailangaben
Hauptverfasser: SU, CHIEN-HAO, HSU, KUON
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:A biosensor test piece manufactured without an etching solvent and a fabrication method thereof. The fabrication method comprises the following steps: firstly, forming a patterned to-be-peeled layer on a substrate, wherein the patterned to-be-peeled layer comprises a masking region and a hollow region; secondly, sputtering a metal film on the marking region of the patterned to-be-peeled layer and the substrate; thirdly, removing the patterned to-be-peeled layer by using a non-etching liquid to remove the metal film located on the marking region, so that the metal thin film forms a detection circuit corresponding to a circuit pattern; fourthly, forming a raising layer and a reaction enzyme on the detection circuit and the substrate; and then performing cleaning by using the non-etching liquid to form the detection circuit, so that the pollution caused by etching can be avoided, the fabrication efficiency is high, and the removed metal thin film can be recycled.