Microwave output device and plasma processing device

In a microwave output device according to one embodiment of the present invention, part of a traveling wave that propagates from a microwave generation unit to an output unit is outputted from a directional coupler. In a first measurement unit, an analog signal corresponding to the power of part of...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	USHIKUBO, TAKAYUKI, MURAI, KOUICHI, KANEKO, KAZUSHI, KAWADA, YUUKI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	In a microwave output device according to one embodiment of the present invention, part of a traveling wave that propagates from a microwave generation unit to an output unit is outputted from a directional coupler. In a first measurement unit, an analog signal corresponding to the power of part of the traveling wave is generated by diode detection, and said analog signal is converted into a digital value. In addition, one or more correction coefficients is selected so as to correspond to the setting power and setting frequency of the microwaves specified to the microwave output device. The one or more selected correction coefficients is multiplied by the digital value to determine a measurement value.