Wafer detection device and detection method of the same

Wafer detection device and detection method of the same

A wafer detection device includes a holder, a carrier for loading a plurality of wafers; a toggle member which is flexible and provided on the holder; and a moving mechanism connected to either the holder or the carrier to make the holder and the carrier move relative to each other, so that the togg...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: TAI, CHANI, YU, CHIA-YUAN, HUANG, JING-WEI, CHANG, CHIA-WEI, LIN, CHUNUAN, LIN, HONGIEH
Format: Patent
Sprache:chi ; eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A wafer detection device includes a holder, a carrier for loading a plurality of wafers; a toggle member which is flexible and provided on the holder; and a moving mechanism connected to either the holder or the carrier to make the holder and the carrier move relative to each other, so that the toggle member contacts an edge of each of the wafers. The wafer detection method includes the following step: moving either the toggle member or the carrier such that the toggle member and the carrier have a relative movement in a first direction, whereby the toggle member contacts an edge of each of the wafers sequentially. In this way, the wafer having a defect can be recognized through the way the toggle member exerts a force on each of the wafers.