Flexible equipment front end module interfaces, environmentally-controlled equipment front end modules, and assembly methods

Flexible equipment front end module interfaces, environmentally-controlled equipment front end modules, and assembly methods

An equipment front end module interface of an equipment front end module including environmental controls. The equipment front end module interface includes a first mounting member configured to couple to a load lock assembly, and a flexible seal coupled to the first mounting member. The flexible se...

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Bibliographische Detailangaben
Hauptverfasser: WYATT, ADAM J, MCANDREW, ROBERT M, VINCENT, JOSEPH, MADDHERLA, PANDU, KUCHAR, MICHAEL C, HRUZEK, DEAN C, SOUNDARRAJAN, VIJAYABASKAR
Format: Patent
Sprache:chi ; eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:An equipment front end module interface of an equipment front end module including environmental controls. The equipment front end module interface includes a first mounting member configured to couple to a load lock assembly, and a flexible seal coupled to the first mounting member. The flexible seal provides sealing between the equipment front end module and the load lock assembly and also accommodates axial and other misalignment between the load lock assembly and the equipment front end module during assembly. Equipment front end modules including the equipment front end module interface and methods of assembling a load lock assembly to the equipment front end module using the equipment front end module interface are provided, as are other aspects.