Resin-sealing device and resin-sealing method

The purpose of the present invention is to resin-seal a workpiece while the workpiece is being adhesively held securely in a high-vacuum state of not more than about 100 Pa. A resin-sealing device is provided with: a first molding mold including a holding surface for a workpiece on which a semicondu...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MORI, HIROHARU, TAKAHASHI, HIROSHI, OHTANI, YOSHIKAZU
Format: Patent
Sprache:chi ; eng
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