Micromechanical component

Micromechanical component

What is proposed is a micromechanical component having a principal plane of extent, wherein the micromechanical component encloses a first cavity and a second cavity, wherein a first pressure prevails in the first cavity and a second pressure prevails in the second cavity, wherein a first layer of t...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SCHWENK, CHRISTOF, SCHMITZ, VOLKER, BREITLING, ACHIM, KUEPPERS, HARTMUT, SCHITTENHELM, NICOLE
Format: Patent
Sprache:chi ; eng
Schlagworte:
ELECTRICITY
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
TRANSPORTING
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Beschreibung
Zusammenfassung:What is proposed is a micromechanical component having a principal plane of extent, wherein the micromechanical component encloses a first cavity and a second cavity, wherein a first pressure prevails in the first cavity and a second pressure prevails in the second cavity, wherein a first layer of the micromechanical component, extending essentially parallel to the principal plane of extent, projects into a second layer of the micromechanical component, extending essentially parallel to the principal plane of extent, between the first cavity and the second cavity and essentially perpendicular to the principal plane of extent.