Coaxial probe card device
A coaxial probe card device including a substrate, a plurality of probe fixtures, and a plurality of probes is provided. The substrate includes a through hole, the plurality of probe fixtures are disposed on the substrate and arranged radially with respect to the center of the through hole. Each of...
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| Hauptverfasser: | , , , , |
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | A coaxial probe card device including a substrate, a plurality of probe fixtures, and a plurality of probes is provided. The substrate includes a through hole, the plurality of probe fixtures are disposed on the substrate and arranged radially with respect to the center of the through hole. Each of the probe fixtures includes a probe recess which is inclined with respect to the surface of the substrate and extends toward the through hole. Each of the probes is disposed in the probe recess of each of the probe fixtures. |
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