Substrate inspection apparatus

Substrate inspection apparatus

Provided is a substrate inspection apparatus capable of preventing deterioration in user convenience at the time of inspecting a semiconductor device without cutting out the same from a substrate. This WLSLT apparatus 10 is connected to a user controller 29 for controlling a PKGSLT apparatus 28, and...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SUGIYAMA, KATSUAKI, KOSUGA, YUTAKA, NARIKAWA, KENICHI, MITSUI, ATSUO
Format: Patent
Sprache:chi ; eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:Provided is a substrate inspection apparatus capable of preventing deterioration in user convenience at the time of inspecting a semiconductor device without cutting out the same from a substrate. This WLSLT apparatus 10 is connected to a user controller 29 for controlling a PKGSLT apparatus 28, and inspects a semiconductor device formed on a wafer W without cutting out the semiconductor device from the wafer W, the WLSLT apparatus 10 comprising a test program engine 27 that converts a command compliant with a command protocol specific to the PKGSLT apparatus 28 into a command compliant with a command protocol specific to the WLSLT apparatus 10.