Apparatus for transferring a substrate

An apparatus for transferring a substrate may transfer a substrate while levitating the substrate. The apparatus for transferring a substrate may include a transfer direction member and a transfer guide member. The transfer direction member may be provided on a peripheral portion of the plate struct...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	KIM, KIUL
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CONVEYING HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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