Apparatus for transferring a substrate

Apparatus for transferring a substrate

An apparatus for transferring a substrate may transfer a substrate while levitating the substrate. The apparatus for transferring a substrate may include a transfer direction member and a transfer guide member. The transfer direction member may be provided on a peripheral portion of the plate struct...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: KIM, KIUL
Format: Patent
Sprache:chi ; eng
Schlagworte:
CONVEYING
HANDLING THIN OR FILAMENTARY MATERIAL
PACKING
PERFORMING OPERATIONS
PNEUMATIC TUBE CONVEYORS
SHOP CONVEYOR SYSTEMS
STORING
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING
TRANSPORTING
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Beschreibung
Zusammenfassung:An apparatus for transferring a substrate may transfer a substrate while levitating the substrate. The apparatus for transferring a substrate may include a transfer direction member and a transfer guide member. The transfer direction member may be provided on a peripheral portion of the plate structure facing with an edge portion of the substrate along a transfer direction of the substrate. The transfer guide member may be disposed over the plate structure toward the transfer direction member, may make contact with portions of the substrate adjacent to a comer portion of the substrate, and may transfer the substrate levitated over the plate structure.