Contact type conductive jig and inspection apparatus

Contact type conductive jig and inspection apparatus

Provided is a contact type conductive jig allowing absorbing ability of height variation of contacting object to be improved easily, and an inspection apparatus. An inspection jig 3 includes: a supporting plate 31 being a plate-like member and formed with a plurality of through holes H penetrating i...

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1. Verfasser: NUMATA, KIYOSHI
Format: Patent
Sprache:chi ; eng
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BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
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creator NUMATA, KIYOSHI
description Provided is a contact type conductive jig allowing absorbing ability of height variation of contacting object to be improved easily, and an inspection apparatus. An inspection jig 3 includes: a supporting plate 31 being a plate-like member and formed with a plurality of through holes H penetrating in a plate thickness direction, probes Pr inserted through the plurality of through holes H respectively, formed with a cylindrical shape and having conductivity, and an elastomer E for elastically holding each probe Pr inside each through hole H, wherein a spiral first spring SO1 extendable in an axial direction of the probe Pr and having a winding direction in a first direction is formed in each probe Pr.
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language chi ; eng
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
title Contact type conductive jig and inspection apparatus
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