Contact type conductive jig and inspection apparatus

Provided is a contact type conductive jig allowing absorbing ability of height variation of contacting object to be improved easily, and an inspection apparatus. An inspection jig 3 includes: a supporting plate 31 being a plate-like member and formed with a plurality of through holes H penetrating i...

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1. Verfasser: NUMATA, KIYOSHI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:Provided is a contact type conductive jig allowing absorbing ability of height variation of contacting object to be improved easily, and an inspection apparatus. An inspection jig 3 includes: a supporting plate 31 being a plate-like member and formed with a plurality of through holes H penetrating in a plate thickness direction, probes Pr inserted through the plurality of through holes H respectively, formed with a cylindrical shape and having conductivity, and an elastomer E for elastically holding each probe Pr inside each through hole H, wherein a spiral first spring SO1 extendable in an axial direction of the probe Pr and having a winding direction in a first direction is formed in each probe Pr.