Substrate transfer robot, vacuum processing apparatus to precisely move a substrate even without detecting the end of arm because the quartz plate will not extend even if the supporting plate extends due to a heating treatment

The present invention provides a substrate transfer robot to precisely move a substrate even without detecting the end of arm. The positioning finger part (55) of arm (40) is constituted in a manner of configuring a quartz plate (42) on a supporting plate (41). A fixed part (50) fixed at the supporting plate (41) is disposed at the root portion of quartz plate (42). The portion of quartz plate (42) other than the fixed part (50) is not fixed to the supporting plate (41). The quartz plate (42) will not extend even if the supporting plate (41) extends due to a heating treatment, so the end-side position-limiting device (56) disposed at the end of quartz plate (42) will not move in response to the thermal expansion.