Lens component and method of assembling electrostatic elements to lens component

A lens component and method of assembling electrostatic elements to lens component are provided. The lens component of an ion implantation system includes a conductive beam optic extending between a set of sidewalls; a feedthrough component provided through openings in the set of sidewalls; and a co...

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Bibliographische Detailangaben
Hauptverfasser:	PIXLEY, JAMES ALAN, HERMANSON, ERIC, JAGTAP, MAYUR
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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