Lens component and method of assembling electrostatic elements to lens component
A lens component and method of assembling electrostatic elements to lens component are provided. The lens component of an ion implantation system includes a conductive beam optic extending between a set of sidewalls; a feedthrough component provided through openings in the set of sidewalls; and a co...
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | A lens component and method of assembling electrostatic elements to lens component are provided. The lens component of an ion implantation system includes a conductive beam optic extending between a set of sidewalls; a feedthrough component provided through openings in the set of sidewalls; and a connector securing the feedthrough component to the conductive beam optic, the connector including a flexible coupling connected at a first end to the conductive beam optic and at a second end to a stub protruding from the feedthrough component. |
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