Needle of linear motor for vacuum

To provide an epoch-making needle of a linear motor for vacuum capable of reducing the gap between the needle and the stator as much as possible, by suppressing deformation with a simple configuration without increasing the thickness of a can, and capable of being used in a system similar to atmosph...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	NAKAMURA, SATOSHI, TAKAHASHI, TEIJI, TERAJIMA, KOJI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CONVERSION OR DISTRIBUTION OF ELECTRIC POWER DYNAMO-ELECTRIC MACHINES ELECTRICITY GENERATION
Online-Zugang:	Volltext bestellen
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