Needle of linear motor for vacuum

To provide an epoch-making needle of a linear motor for vacuum capable of reducing the gap between the needle and the stator as much as possible, by suppressing deformation with a simple configuration without increasing the thickness of a can, and capable of being used in a system similar to atmosph...

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Bibliographische Detailangaben
Hauptverfasser: NAKAMURA, SATOSHI, TAKAHASHI, TEIJI, TERAJIMA, KOJI
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:To provide an epoch-making needle of a linear motor for vacuum capable of reducing the gap between the needle and the stator as much as possible, by suppressing deformation with a simple configuration without increasing the thickness of a can, and capable of being used in a system similar to atmospheric environment. The needle of a linear motor for vacuum constituted of a stator 2 formed by arranging magnets 1 side by side, and the needle 3 moving in the arrangement direction of the magnets 1 consists of a box-shaped housing section 4 having an opening for housing a coil, and a lid 5 for closing the opening of the housing section 4. A reinforcement rib 6 is provided on the bottom face of the housing section 4 facing the lid 5 for closing the opening, or on the lid 5, and then the reinforcement rib 6 and the lid 5 or the housing section 4 are fastened by a fastening member.