Apparatus for inspecting semiconductor device

Disclosed is an apparatus for inspecting a semiconductor device. An inspection unit inspects semiconductor devices received in a tray transferred from a loading unit. A sorting unit comprises: a first waiting area in which an empty tray, transferred from an empty tray providing unit, waits; a second...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KWON, DAE-KAB, KO, SEUNG-GYU, JOO, BYEONG-GWON, AN, JU-HUN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING
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