Apparatus for inspecting semiconductor device

Disclosed is an apparatus for inspecting a semiconductor device. An inspection unit inspects semiconductor devices received in a tray transferred from a loading unit. A sorting unit comprises: a first waiting area in which an empty tray, transferred from an empty tray providing unit, waits; a second waiting area in which a tray, having inspected semiconductor devices, waits; and a buffer area in which another tray, having inspected semiconductor devices, is temporarily stored. A defective product storing unit receives, from the first waiting area, a tray having semiconductor devices that are sorted as defective products, and stores the received tray. The empty tray storing unit receives the empty tray from the buffer area and stores the received empty tray. An unloading unit receives, from the second waiting area, a tray where semiconductor devices classified as normal products are received, or are discharged after being received, and stores the received tray. A sorting picker picks up defective semiconductor