Pick-up device

A pick-up device 1 is a device that vacuum picks up a workpiece W to a pick-up face 1a by way of a plurality of vacuum pick-up units 2 having a pick-up hole 25 provided on the pick-up face 1a, wherein the vacuum pick-up unit 2 comprises: a suction chamber 27 that communicates with the pick-up hole 25; a recess 31 that is provided on a bottom wall face 27a defining the vacuum chamber 27; a suction hole 32 that has a suction opening 32a opening to the top of an inclined wall face 31a defining the recess 31 and whereby the suction chamber 27 communicates with a negative pressure chamber 43; and an opening-closing valve 29 that can open and close the suction opening 32a. The opening-closing valve 29 has a base 29a that is fixed with respect to the bottom wall face 27a at a position outside of the recess 31, and a movable piece 29b that extends from the base 29a toward the suction hole 32a side of the recess 31 and is disposed in a state of being separated from the inclined wall face 31a. The base 29a and the mova